SubstrateÕlayer interface of amorphous-carbon hard coatings

A combined study of the crystalline structure, the chemical interaction, and diffusion processes of the substrate/layer interface of amorphous-carbon hard coatings is presented. The structure of the coatings and their gradient layer interface to a chromium buffer layer has been investigated on two substrates @Si~100! and tool steel# using x-ray diffraction ~XRD!. Chemical interaction and diffusion processes at the interfaces and within the layers were analyzed by Auger electron spectroscopy and x-ray photoemission spectroscopy depth profiles. The chromium buffer layer revealed similar textured structure on both substrates. The subsequent gradient layer was determined ~within XRD limits! to be amorphous and composed of an amorphous-carbon and chromium-carbide composite. The chromium carbide maintains the same stoichiometry (Cr3C2), regardless of the gradually changing chromium content. No large-scale interdiffusion was measured, either between or within the layers. © 2000 American Institute of Physics. @S0021-8979~00!01016-1#